Semiconductor
Industry Overview
PEEK material plays an irreplaceable role in semiconductor manufacturing. With excellent high-temperature resistance (260°C+), extremely low outgassing, high purity with low metal ion content, and outstanding plasma corrosion resistance, PEEK has become the material of choice for critical components in wafer fabrication equipment.
Case Studies
CMP Retaining Ring
Critical consumable in chemical mechanical polishing, requiring wear resistance, slurry corrosion resistance, and low particle generation
Illumination Unit
Core chamber component in lithography illumination systems, requiring low outgassing, UV radiation resistance, and high dimensional accuracy to ensure optical path stability and cleanliness
Insulation Ring
Insulating support in etching and deposition equipment, requiring plasma corrosion resistance, high insulation, and low outgassing to maintain chamber electric field stability
Test Socket Base
Chip mounting base for IC burn-in and functional testing, requiring high-temperature resistance, high insulation, and low outgassing to ensure stable test contact
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